Nikon's DSP-110 lithography system patterns 72 panels per hour at 1.5 µm
Nikon's maskless DSP-110 for advanced packaging is about 40 percent faster than the DSP-100 and can be upgraded to 1.0 µm resolution.
Japanese optics company. Its industrial units make NEXIV video measuring systems, industrial microscopes and lithography systems, and Nikon SLM Solutions builds metal 3D printers.
Nikon's maskless DSP-110 for advanced packaging is about 40 percent faster than the DSP-100 and can be upgraded to 1.0 µm resolution.