Nikon has added a third model to its NEXIV VMF-K Series of video measuring systems: the VMF-K6561, which features a 650×610 mm stage built to handle full-panel measurement of panel-level packages up to 600×600 mm. The system combines simultaneous 2D and height measurement via a confocal optical system, and Nikon rates throughput at 1.5 times that of the predecessor VMZ-K Series.
The VMF-K6561's stage uses increased glass thickness compared to the smaller VMF-K6555, which Nikon says improves measurement stability across large substrates. All three models in the series include a 45x objective lens capable of resolving features below 2 micrometers, supporting wafer-level packaging inspection and advanced packaging structures. The series also maintains coordinate precision for long-dimension measurements that exceed the camera's field of view, relevant to probe card and bonding wire evaluation.
What's new across the VMF-K generation is the light source. Nikon replaced the xenon confocal source used in the VMZ-K with an LED, extending rated service life from 3,000 hours to 30,000 hours. On a production-line system, that tenfold increase in lamp life reduces scheduled maintenance intervals directly.
The series handles high-contrast and transparent samples, including metal surface films and semiconductor resists, where varying reflectivity tends to destabilize optical measurement. All configurations meet SEMI S2/S8 standards when installed according to Nikon's guidelines.
The original two models remain available: the VMF-K3040 with 300×400×150 mm strokes and the VMF-K6555 with 650×550×150 mm strokes. Nikon also includes a conversion function for teaching files built on the VMZ-K, translating caliper dimensions to the VMF-K camera's pixel count so facilities do not need to rebuild measurement programs when upgrading.
