Micro-Epsilon sensor measures 300 mm wafer warpage in one capture
The reflectCONTROL RCS3500-300 uses deflectometry to check bow and planarity on wafers up to 300 mm, with capture times from 1 s and no stitching.
Company · Ortenburg, DE
Micro-Epsilon
German maker of displacement, distance and position sensors, laser profile scanners and inline measuring systems such as profileGAUGE.
