Fraunhofer IPM's HoloTop Motion measures moving wafers in 3D at up to 1m/s
The holographic sensor reaches better than 2µm lateral resolution without stopping parts, and will be shown at SEMICON Europa in Munich, November 10–13.
Company · Munich, DE
Fraunhofer
Germany's applied research organization. Stories here come from its institutes, including Fraunhofer IPM, IIS, EMI and IAF, on optical measurement, X-ray CT and sensor chips.
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