Sensofar has introduced the S neox 6, the newest version of its optical 3D surface profiler, and the pitch this time is speed and travel rather than a new sensor. The system acquires data up to twice as fast as the previous generation, and its motorized Z range now reaches 100 mm. The four measuring technologies carry over unchanged: confocal, interferometry, Ai Focus Variation, and thin-film reflectometry.
Most of what's new is in how the instrument moves and focuses. A motorized tip-tilt tilts the sample to level it automatically, instead of the operator shimming it by hand, and a direct autofocus finds focus in one step.
Sensofar also added a Surface Adaptive Mode that changes acquisition settings mid-scan when a sample's reflectivity varies across the field, the situation that usually forces a second pass with different settings.
Two imaging modes target harder samples. Boosted Resolution sharpens image-based scans for fine structure, and a high-aspect-ratio mode swaps in lower-magnification, lower-NA objectives to see down into deep features, measuring vias and trenches at ratios up to roughly 24:1, the kind of trench geometry that trips up higher-NA optics.
The core specs are steady. The camera is 5 megapixels at 106 fps, or 204 in HD. Measurement noise runs as low as 2 nm at 150X, or 0.1 nm in PSI, dropping to 0.01 nm with the optional piezoelectric scanner. Vertical measuring range spans 20 µm in PSI up to 36.5 mm in confocal and Ai Focus Variation. The motorized stage comes in 154 mm or 302 mm square and takes parts up to 25 kg and 100 mm tall.
The software moves up a version across the board, SensoSCAN 8, SensoVIEW 3, and SensoPRO 5 for automated QC. Sensofar aims the system at semiconductors and advanced packaging, precision manufacturing, aerospace, medical devices, and photonics.
